Contact Gauging System

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Contact Gauging System

With contact measurement, measurement accuracy of 1 micron can be achieved, and the instrument is easy to operate and stable. Suitable for use in a variety of environments, the base is acid and alkali resistant and is a commonly used measuring instrument for semiconductors, optical and photoelectric materials etc.

Functional Feature Description

Technical Application

• The contact gauging system is equipped with a measuring probe that contacts the sample surface downward and displays the thickness of the sample measured through a digital display system.
• Measuring accuracy of 1 micron.
• Fast response, high precision, not affected by the material of the measured target.
• Measuring arm with fine adjustment
• Measuring range : 0-180 mm
• Thickness range : 0 to 500 mm (or range can be set on request)
• Sample size : 8 inches and below
• The marble base is rigid, hard, wear-resistant and anti-pressured.
• Suitable for various environments, acid and alkali resistant.
• Dimensions can be customized according to user requirements.

Applicable materials include:
• Silicon-based materials (Si, a-Si, poly Si)
• III-V materials (GaAs, InP, GaSb, etc.)
• Third generation semiconductor materials (SiC, GaN, etc.)
• Infrared materials (CZT, MCT, etc.)
• Photoelectric materials (LiNbO₃, LiTaO₃, SiO₂, etc.)
• Metallic materials (Au, Cu, Al, Mo, TC4, etc.)
The scope of application includes:
• MEMS
• Semiconductor devices
• Semiconductor substrate
• Encapsulation

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Contact Gauging System

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