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Flatness tester

The flatness tester has digital display and is easy to operate. Ensure process repeatability and consistency, applicable to the entire range of products. Helps operators to accurately set equipment parameters and achieve high-quality grinding and polishing effects.

  • Functional Feature Description
  • Technical Application
    • The flatness tester has digital display and is easy to operate. Ensure process repeatability and consistency. Suitable for all products in the series, the flatness tester can be customized according to user needs.
    • The measurement accuracy of the flatness tester is 1um, which is beneficial for III-V materials or ultra-thin and fragile materials, and precise pressure control in the grinding and polishing process.
    • Applicable materials include:

      • Silicon based materials (Si, a-Si, poly Si)

      • III-V materials (GaAs, InP, GaSb, etc.)

      • Third generation semiconductor materials (SiC, GaN, etc.)

      • Infrared materials (CZT, MCT, etc.)

      • Optoelectronic materials (LiNbO æ, LiTaO æ, SiO ₂, etc.)

      • Metal materials (Au, Cu, Al, Mo, TC4, etc.)

       
    • The scope of application includes:

      • MEMS

      • Semiconductor devices

      • Semiconductor substrate

      • Packaging

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