FMS150

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FMS150

The FMS150 flatness measurement system provides nanometer-level surface flatness measurement performance for precision flat component manufacturers. Utilizing non-contact optical interference technology, it enables rapid analysis of the entire surface of components, assisting users in quickly identifying flatness profile errors from smooth to rough planes.

Functional Feature Description

Technical Application

·Grazing Incidence Interferometry:
Vertical resolution: 10nm;
Dynamic measurement range: 100μm.

·Non-contact measurement:
Eliminates surface damage risks associated with traditional contact profilometers；

·Large-field single-shot interferometric imaging:
Full-aperture measurement (up to 150mm) completed in seconds.
·Adopting optical interference technology to
achieve material flatness measurement;

·Measurement of samples 150mm and below;

·Support fast non-destructive testing;

·Fast, simple, accurate and highly repeatable;

Model	FMS150
Effective Aperture	Ø150mm
Light Source	630nm laser
Flatness Range	>100µm
Resolution Method	Qualitative fringe pattern analysis (interferometric)
Accuracy Method	Qualitative fringe pattern analysis (interferometric)
Software Features	Real-time fringe pattern visualization
Environmental Conditions	Temperature: 22±2°C, Humidity: <60% RH
Dimensions (L×W×H)	600mm × 400mm × 410mm

This flatness measurement system utilizes grazing-incidence light to interact with the surface, acquiring surface topography by measuring interference patterns of reflected light. This method is particularly suitable for rough surface measurements, as grazing-incidence illumination better captures microscopic surface variations while reducing high-contrast speckle noise interference, thereby improving measurement sensitivity and accuracy.

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FMS150

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