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HOME > Product > Testing Equipment > Laser Plane Interferometer > Laser Plane Interferometer

Laser Plane Interferometer

Laser plane interferometer is a kind of optical precision measuring instrument which is convenient to use. The instrument can be used in optical workshop, laboratory, measuring room.

  • Functional Feature Description
  • Technical Application
    • • Measurement method: Fizeau interference principle
      • Light aperture: 60mm
      • Test wavelength: 635nm (semiconductor laser)
      • Alignment mode: simple two point alignment
      • Alignment field of view: ±0.5 degrees
      • Precision of plane standard mirror: PV: λ/10
    • Applicable materials include:
      • Silicon-based materials (Si, a-Si, poly Si)
      • III-V materials (GaAs, InP, GaSb, etc.)
      • Third generation semiconductor materials (SiC, GaN, etc.)
      • Infrared materials (CZT, MCT, etc.)
      • Photoelectric materials (LiNbO₃, LiTaO₃, SiO₂, etc.)
      • Metallic materials (Au, Cu, Al, Mo, TC4, etc.)
    • The scope of application includes:
      • MEMS
      • Semiconductor devices
      • Semiconductor substrate
      • Encapsulation

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