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HOME > Product > Testing Equipment >  3D measurement microscope  > MS1000

MS1000

MS1000 is easy to operate, with complete measurement functions, covering nanoscale micro profiles, two-dimensional dimensions, and spectral analysis. It has strong versatility and high accuracy, helping our customers stay at the forefront of precision manufacturing and material research and development.

  • Functional Feature Description
  • Technical Application
    • • Non contact measurement of surface three-dimensional roughness





      • Measurement of surface micro three-dimensional structure





      • Microscopic reflectance spectroscopy measurement (optional)
    • The Micro1000 3D measurement microscope is used for nanoscale measurements of various precision devices and material surfaces; Based on the principle of white light interference technology, combined with precision Z-axis scanning module, 3D modeling algorithm, etc., non-contact scanning is performed on the surface of the device to establish a surface 3D image. The 3D image of the device surface is processed and analyzed through system software, and 2D and 3D parameters reflecting the surface quality of the device are obtained, thereby achieving an optical detection instrument for 3D measurement of device surface morphology.
    • • Single measurement field of view: (10X objective lens) 1000 * 700um longitudinal scanning range 0-10mm
      • Longitudinal measurement repeatability of 0.5nm (PSl mode Ra value)
      • Optical resolution @ 550nm: 0.92um (10X interference objective)
      • Measurement time<5s (PSl mode)
      • Software features: micro image collection, roughness analysis, three-dimensional display of microstructure, and micro dimensions
      • Measurement, one click measurement function
      • Data output: 3D point cloud data, grayscale image data, customized reports
    • • White light interference microscopy measurement principle: using a white light source, combining incoherent light interference with high-resolution microscopy imaging technology, high-precision reconstruction of micro three-dimensional contours, longitudinal resolution can reach sub nanometer level

      • Micro spectral measurement: The optional spectral module can achieve surface micro area spectral measurement and film thickness measurement functions

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