MS2000

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MS2000

Based on the principle of white light interference technology and combined with precision B-scan module 3D modeling algorithm, non-contact scanning is performed on the surface of the device to establish a surface 3D image. The 3D image of the device surface is processed and analyzed through system software, and 2D and 3D parameters reflecting the surface quality of the device are obtained to achieve 3D measurement of the device surface morphology.

Functional Feature Description

Technical Application

• Superior surface roughness measurement capability (sub nanometer to micrometer scale)

• High efficiency large area 3D contour measurement capability (from micrometer level measurement area to hundred millimeter level measurement area)

• High definition and deep field imaging capability in large areas
• Surface roughness/3D microstructure measurement

• White light interference (PSI/VSI): Ra measurement accuracy of 0.1nm

• Spectral confocal large-area 3D contour scanning

• Ultra depth of field measurement

• Suitable for efficient and high-precision macro and micro 3D measurement

• Single measurement field of view: (20X interference objective) 500 * 350um

• Vertical scanning range: 10mm

• Vertical resolution: 0.2nm

• Measurable sample reflectance: 0.1%~100%

• Roughness RMS repeatability: 0.01nm

• Technical parameters

• Step measurement: accuracy<1%, repeatability 0.2% 10

• Optical resolution @ 550nm: 0.69um (20X interference objective)

• Measurement time:<5s (PSI mode)

• Software features: micro mapping, roughness analysis, step height measurement, and three-dimensional microstructure analysis

• Display, micro size measurement, one click measurement function

• Data output: 3D point cloud data, grayscale image data, customized reports
• Principle of white light interference microscopy measurement: Using a white light source, combining incoherent light interference with high-resolution microscopy imaging technology, high-precision reconstruction of micro three-dimensional contours can be achieved, and longitudinal measurement resolution can reach sub nanometer level

• Principle of Regional 3D Contour Scanning: Spectral Confocal Measurement Principle

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MS2000

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