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With nanometer and longitudinal resolution to meet the measurement and analysis of ultra-smooth surfaces

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PSI / VSI / brightfield and other measurement modes

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The stage can be translated at a distance of more than 200mm

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The stage can be adjusted in angle,position,and resolution

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Simple,precise,fast and highly reproducible

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Focused positioning Laser-assisted interferometric fringe positioning

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Supportive of different magnification interferometric objectives

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Meet different customization needs






