-
High machining accuracy,with TTV≤2 um and RA ≤0.1 nm

-
Suitable for processing of various special-shaped wafers below 6 inches

-
Fitted with a disk-typed bluetooth unit for monitoring and automatic repair

-
Pressure accuracy of the fixture reaching 2g/cm² and customizable pressurization module

-
Highly efficient to support up to four stations at the same time

-
Editable to store at least 100 processes

-
Capable of temperature control,such as tray temperature monitoring and automatic cooling

-
All-in-one lapping and polishing machine with high operability and compatibility






