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Whats

Whats

CDP-400 Manual
  • 抛光粗糙度、速率、一致性行业领先
  • 具备精准的光学EPD终点检测功能
  • 可编辑和储存至少100条以上工艺菜单
  • 可实现盘温监控、自动冷却、自动冲洗
  • 可加工2-6寸及异形晶圆
  • 抛光头压力可调制范围0.5-8psi
  • The polishing head supports 3-zone pressure control
  • Nanometer-level removal accuracy

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  • Lapping and Polishing Machine

  • CMP与清洗

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