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With nanometer and longitudinal resolution to meet the measurement and analysis of ultra-smooth surfaces
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PSI / VSI / brightfield and other measurement modes
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The stage can be translated at a distance of more than 200mm
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The stage can be adjusted in angle,position,and resolution
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Simple,precise,fast and highly reproducible
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Focused positioning Laser-assisted interferometric fringe positioning
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Supportive of different magnification interferometric objectives
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Meet different customization needs