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加工精度高,TTV≤2 um,RA:≤0.1 nm
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适用6寸以下及各类异形晶圆加工
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It is equipped with a cleaning tank and a flushing device to realize the integration of lapping and polishing
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The pressure accuracy of the fixture reaches 2g/cm² and the pressurization module can be customized
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Optional Bluetooth monitoring and Zion repair disc function
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Editable to store at least 100 processes
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It has temperature control functions such as tray temperature monitoring and automatic cooling